Coaxial twin-shaft magnetic fluid seals applied in vacuum wafer-handling robot
Authors:
- 18 July 2012
- journal article
- Published by Elsevier in Chinese Journal of Mechanical Engineering
- Vol. 25 (4) , 706-714
Abstract
Compared with traditional mechanical seals, magnetic fluid seals have unique characters of high airtightness, minimal friction torque requirements, pollution-free and long life-span, widely used in...Keywords
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