Determination of full material constants of ScAlN thin film from bulk and leaky Lamb waves in MEMS-based samples
Authors:
- 1 September 2014
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. emas 6100 (10510117) , 273-276
Abstract
The full material constants of a 40% Sc-AlN thin film were systematically determined. First, 4 kinds of MEMS resonators and a Lamb wave resonator were used to determine the material constants as much as possible. The other unknown material constants together with the material constants which needed more accurate estimation were determined based on ultrasonic microspectroscopy and parameter fitting. The phase velocity versus frequency (v-f) characteristics of A0 and S0 mode leaky Lamb waves in a self-suspended ScAlN film were measured using an ultrasonic microscope, and then theoretical v-f characteristics were fitted to the measured ones by tuning the material constants as parameters.Keywords
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