Fiber deflection probing method based on micro focal-length collimation
Authors:
- 27 January 2010
- journal article
- Published by Optica Publishing Group in Optics Express
- Vol. 18 (3) , 2925-2933
Abstract
In order to improve the low displacement sensitivity in sensing the 2D deflection of a fiber probe used for measurement of micro cavities with high aspect ratio, a fiber stem with a ball mounted on its end is used as a probe and a small segment of it is used as a cylindrical lens to collimate a point light source and image it to a camera. The deflection of the fiber stem can be inferred from the change in image acquired by the camera with ultrahigh displacement sensitivities of 10,000 and 20,000 in two dimensions using a fiber stem of 44 μm in diameter, and the corresponding resolutions are better than 1 nm and 3 nm respectively.Keywords
This publication has 10 references indexed in Scilit:
- Fiber deflection probe for small hole metrologyPrecision Engineering, 2006
- Development of a Silicon-based Nanoprobe System for 3-D MeasurementsCIRP Annals, 2001
- Opto-tactile Sensor for 2D and 3D Measurement of Small Structures on Coordinate Measuring MachinesCIRP Annals, 2001
- Development of The Nano-CMM Probe based on Laser Trapping TechnologyCIRP Annals, 1999
- Design for a Compact High-Accuracy CMMCIRP Annals, 1999
- A probe for the measurement of diameters and form errors of small holesMeasurement Science and Technology, 1998
- Twin-Probe Vibroscanning Method for Dimensional Measurement of MicroholesCIRP Annals, 1997
- Accuracy Limitations of Fast Mechanical ProbingCIRP Annals, 1996
- A 3D Probe for Measuring Small Blind HolesCIRP Annals, 1995
- Vibroscanning Method for Nondestructive Measurement of Small HolesCIRP Annals, 1993