Study on the electrical, optical, structural, and morphological properties of highly transparent and conductive AZO thin films prepared near room temperature
Authors:
- Long WenLWLong Wen
- Bibhuti B. SahuBSBibhuti B. Sahu
- Hye R. KimHKHye R. Kim
- Jeon G. HanJHJeon G. Han
- 1 April 2019
- journal article
- research article
- Published by Elsevier in Applied Surface Science
- Vol. 473, 649-656
Abstract
No abstract availableKeywords
Funding Information
- National Research Foundation of Korea
- Ministry of Science, ICT and Future Planning (NRF- 2017R1A2B4006071)
This publication has 36 references indexed in Scilit:
- Reliability of sputter deposited aluminum-doped zinc oxide under harsh environmental conditionsSolar Energy, 2013
- Past achievements and future challenges in the development of optically transparent electrodesNature Photonics, 2012
- Room temperature deposition of Al-doped ZnO thin films on glass by RF magnetron sputtering under different Ar gas pressureJournal of Alloys and Compounds, 2011
- Effects of Energetic Ion Bombardment on Structural and Electrical Properties of Al-Doped ZnO Films Deposited by RF-Superimposed DC Magnetron SputteringJapanese Journal of Applied Physics, 2010
- Deposition of Ag-based Al-doped ZnO multilayer coatings for the transparent conductive electrodes by electron beam evaporationSolar Energy Materials and Solar Cells, 2007
- Thin-Film Transistor Fabricated in Single-Crystalline Transparent Oxide SemiconductorScience, 2003
- Preparation of transparent and conductive Al-doped ZnO thin films by ECR plasma enhanced CVDSurface and Coatings Technology, 2002
- Electronic band structure of indium tin oxide and criteria for transparent conducting behaviorPhysical Review B, 2001
- Magnetron sputtering of transparent conductive zinc oxide: relation between the sputtering parameters and the electronic propertiesJournal of Physics D: Applied Physics, 2000
- Influence of annealing on the optical properties of indium tin oxideThin Solid Films, 1991