Plasma production by helicon waves
Authors:
- 1 February 1993
- journal article
- Published by IOP Publishing in Plasma Sources Science and Technology
- Vol. 2 (1) , 5-10
Abstract
No abstract availableKeywords
This publication has 12 references indexed in Scilit:
- Experiments on helicon plasma sourcesJournal of Vacuum Science & Technology A, 1992
- Electron acceleration in helicon sourcesPlasma Physics and Controlled Fusion, 1992
- Helicon waves and efficient plasma productionPhysics of Fluids B: Plasma Physics, 1991
- Observation of nonthermal electron tails in an rf excited argon magnetoplasmaPhysics of Fluids B: Plasma Physics, 1991
- Plasma ionization by helicon wavesPlasma Physics and Controlled Fusion, 1991
- Multipole confined diffusion plasma produced by 13.56 MHz electrodeless sourceJournal of Vacuum Science & Technology A, 1989
- Fast anisotropic etching of silicon in an inductively coupled plasma reactorApplied Physics Letters, 1989
- Very efficient plasma generation by whistler waves near the lower hybrid frequencyPlasma Physics and Controlled Fusion, 1984
- Spectrum of low-frequency, nonaxisymmetric oscillations in a cold, current-carrying plasma columnThe Physics of Fluids, 1984
- Boundary effects on M=0,±1 Alfvén waves in a cylindrical, collisionless plasmaThe Physics of Fluids, 1975