Deposition of Indium Tin Oxide Films on Acrylic Substrates by Radiofrequency Magnetron Sputtering
Authors:
- 1 July 1994
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 77 (7) , 1740-1744
Abstract
Indium tin oxide (ITO) films were deposited onto acrylic substrates by rf magnetron sputtering. Low substrate temperature (Keywords
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