Multi stage noise shaping sigma–delta modulator (MASH) for capacitive MEMS accelerometers

This publication has 12 references indexed in Scilit:

• Sigma-Delta Modulators: Tutorial Overview, Design Guide, and State-of-the-Art Survey
  IEEE Transactions on Circuits and Systems I: Regular Papers, 2010
• Higher Order Noise-Shaping Filters for High-Performance Micromachined Accelerometers
  IEEE Transactions on Instrumentation and Measurement, 2007
• Squeeze film air damping in MEMS
  Sensors and Actuators A: Physical, 2007
• Sturdy MASH Δ-Σ modulator
  Electronics Letters, 2006
• A high-performance accelerometer with a fifth-order sigma–delta modulator
  Journal of Micromechanics and Microengineering, 2005
• Adaptive digital correction of analog errors in MASH ADCs. II. Correction using test-signal injection
  IEEE Transactions on Circuits and Systems II: Analog and Digital Signal Processing, 2000
• Adaptive digital correction of analog errors in MASH ADCs. I. Off-line and blind on-line calibration
  IEEE Transactions on Circuits and Systems II: Analog and Digital Signal Processing, 2000
• A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics
  IEEE Journal of Solid-State Circuits, 1999
• A sensitive differential capacitance to voltage converter for sensor applications
  IEEE Transactions on Instrumentation and Measurement, 1999
• A cascaded sigma-delta pipeline A/D converter with 1.25 MHz signal bandwidth and 89 dB SNR
  IEEE Journal of Solid-State Circuits, 1997