Signal response metrology (SRM): a new approach for lithography metrology

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19 March 2015

conference paper
Published by SPIE-Intl Soc Optical Eng

Vol. 9424, 94241P-94241P-14
DOI:10.1117/12.2086056

Abstract

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This publication has 1 reference indexed in Scilit:

Scatterometry-based on-product focus measurement and monitoring
2013