Diamond turning of silicon substrates in ductile-regime
Authors:
- T.P LeungTLT.P Leung
- W.B LeeW.B Lee
- X.M LuXLX.M Lu
- 1 January 1998
- journal article
- Published by Elsevier in Journal of Materials Processing Technology
- Vol. 73 (1-3) , 42-48
Abstract
No abstract availableKeywords
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