Properties of tantalum sputtered films
Authors:
- D GerstenbergDGD Gerstenberg
- E.H MayerEME.H Mayer
- 1 January 1962
- journal article
- Published by Elsevier in Microelectronics Reliability
- Vol. 1 (4) , 353-358
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Integrated Thin-Film CircuitsIRE Transactions on Component Parts, 1961
- Die Kristallstruktur des Tantalnitrids TaNThe Science of Nature, 1953
- A new interpretation of interstitial compounds–metallic carbides, nitrides and oxides of compositionMXActa Crystallographica, 1948