Damage production and arsenic displacement in silicon by proton and helium irradiation
Authors:
- W.H. KoolWKW.H. Kool
- H.E. RoosendaalHRH.E. Roosendaal
- L.W. WiggersLWL.W. Wiggers
- F.W. SarisFSF.W. Saris
- 1 January 1976
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 132, 285-291
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Channeling measurements in As-doped SiJournal of Applied Physics, 1972
- Depth Profiles of the Lattice Disorder Resulting from Ion Bombardment of Silicon Single CrystalsJournal of Applied Physics, 1970
- The Displacement of Atoms in Solids by RadiationReports on Progress in Physics, 1955