Investigation of Angle Drift Induced by Actuation Electrode Errors for Whole-Angle Micro-Shell Resonator Gyroscope

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Abstract
The symmetry of the actuation electrode is of great importance for the whole-angle gyroscope. In this paper, the angle drift induced by actuation electrode errors of micro-shell resonator gyroscope is investigated. The actuation electrode errors due to the assembly of the micro-shell resonator and substrate electrode would result in interference effects between the energy and pattern-angle control loops and produce the additional angle drift which has great influences on the performance. The additional angle drift is investigated from experimental and simulation analysis under various actuation gain and angle errors. Furthermore, the characterization and compensation methods of actuation electrode errors are also proposed to eliminate the interference effects of control loops and the additional angle drift. After compensation, the scale-factor nonlinearity and bias instability has been improved by 3 and 2 times to 5.79ppm and 0.064 °/h.
Funding Information
  • Microsystem Technology Laboratory, National University of Defense Technology
  • Hunan micro-electromechanical system (MEMS) Research Center
  • National Natural Science Foundation of China (52075540, 51935013, 51905538)
  • National Key Research and Development Program of China (2018YFB2002304)
  • Hunan Science Foundation for Distinguished Young Scholars (2020JJ2033)

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