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  3. Optimization of optical lens-controlled scanning electron microscopic resolution using generalized regression neural network and genetic algorithm
  1. Home
  2. Publications
  3. Optimization of optical lens-controlled scanning electron microscopic resolution using generalized regression neural network and genetic algorithm

Optimization of optical lens-controlled scanning electron microscopic resolution using generalized regression neural network and genetic algorithm

Authors:
  • BKByungwhan Kim
    Byungwhan Kim
  • DKDong Hwan Kim
    Dong Hwan Kim

Publisher website
Google Scholar
  • 31 January 2010
    • journal article
    • Published by Elsevier in Expert Systems with Applications
    • Vol. 37  (1) , 182-186
    • DOI:10.1016/j.eswa.2009.05.007
Abstract
No abstract available
Keywords
  • SCANNING ELECTRON MICROSCOPE
  • RESOLUTION
  • GENERALIZED REGRESSION NEURAL NETWORK
  • GENETIC ALGORITHM MODEL
  • STATISTICAL EXPERIMENT
  • LENS
  • STATISTICAL REGRESSION MODEL
Cited by 16 articles
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