Dielectric and Electromechanical Properties of Pb(Zr,Ti)O₃Thin Films for Piezo-Microelectromechanical System Devices

Authors:

Publisher website

30 September 2003

journal article
Published by IOP Publishing in Japanese Journal of Applied Physics

Vol. 42 (Part 1, No) , 5952-5955
DOI:10.1143/jjap.42.5952

Abstract

No abstract available

Keywords

Cited by 37 articles