Low-temperature bonding of silicon/glass enabled by micro–nano-structures and nano-silver paste

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Abstract
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Funding Information
  • Excellent Young Scientists Program of Hunan Provincial Department of Education (23B0017)
  • National Natural Science Foundation of China Joint Fund for Regional Innovation Development (U22A20200)
  • Key Program for Basic Research (JCKY2023210A005)
  • The National Key R&D Program of China (2023YFB4605500)

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