Extremely small multimode interference couplers and ultrashort bends on InP by deep etching
Authors:
- E.G. MetaalEME.G. Metaal
- F.H. GreenFGF.H. Green
- I. MoermanIMI. Moerman
- M.K. SmitMSM.K. Smit
- 1 August 1994
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 6 (8) , 1008-1010
Abstract
We realized the smallest integrated optical multimode interference (MMI) couplers to date by etching through the quaternary guiding layer, maximizing the lateral index contrast, and thus obtaining a sufficient number of guided modes for proper operation despite the small size. Results include a 107 μm long 3 dB coupler with 0.9 dB excess loss and 0.2 dB unbalance, and a 216 μm long cross coupler with 2.0 dB excess loss and -28 dB crosstalk (TE). We also succeeded in making waveguide bends with a record bending radius of only 30 μm and negligible radiation loss.Keywords
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