Effect of gas Pressure on the Mechanical Properties of Sputtered TaN Films
Authors:
- Erbao LiuELErbao Liu
- Guo JinGJGuo Jin
- Xiufang CuiXCXiufang Cui
- Qiang XiaoQXQiang Xiao
- Tianmin ShaoTSTianmin Shao
Open Access
- 1 January 2013
- journal article
- Published by Elsevier in Physics Procedia
- Vol. 50, 438-441
Abstract
No abstract availableKeywords
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