A method of utilizing lithium-induced nuclear reactions in the determination of carbon, nitrogen, and oxygen in thin films
Authors:
- 1 May 1975
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 26 (9) , 543-545
Abstract
A method of analysis of oxygen, nitrogen, and carbon in thin samples involves the detection of charged particles from nuclear reactions induced by a 7‐MeV lithium‐6 beam. The particle detection with a telescope counter near 0° takes full advantage of high exothermic reactions. The sensitivity is of the order of 10−3 μg/cm2. A preliminary study of the contaminants introduced during the sputtering of niobium is presented.Keywords
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