Microstructure, mechanical and tribological properties of TiMoN/Si3N4 nano-multilayer films deposited by magnetron sputtering
Authors:
- Tao WangTWTao Wang
- Guojun ZhangGZGuojun Zhang
- Bailing JiangBJBailing Jiang
- 1 January 2015
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 326, 162-167
Abstract
No abstract availableKeywords
Funding Information
- National Natural Science Foundation (51171149 and 51371141)
- National Science Technology Supporting Program of China (2012BAE06B02)
- Science Technology Co-ordination Innovation Project of Shaanxi Province (2013KTZB01-03-04)
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