Effects of the silicon-to-carbon ratio and the hydrogen content in amorphous SiC thin films prepared by reactive sputtering
Authors:
- M. Le ContellecMCM. Le Contellec
- J. RichardJRJ. Richard
- A. Guivarc'HAGA. Guivarc'H
- E. LigeonELE. Ligeon
- J. FontenilleJFJ. Fontenille
- 1 April 1979
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 58 (2) , 407-411
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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