Hydrogen effect on density and Young's modulus of thin films in acoustic sensors
Authors:
- I. KerroumIKI. Kerroum
- M.E. FallMFM.E. Fall
- A. ReinhardtARA. Reinhardt
- F. DomingueFDF. Domingue
- 1 February 2016
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 223, 520-526
Abstract
No abstract availableKeywords
Funding Information
- Natural Sciences and Engineering Research Council
- Nature et technologies
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