Effects of polishing media on the surface chemical and micromechanical properties of SiC
Authors:
- Xue LiXLXue Li
- Xiongjie WuXWXiongjie Wu
- Pengfei WuPWPengfei Wu
- Julong YuanJYJulong Yuan
- Yongwei ZhuYZYongwei Zhu
- 4 January 2024
- journal article
- research article
- Published by Elsevier in Computational Materials Science
- Vol. 233
Abstract
No abstract availableKeywords
Funding Information
- National Natural Science Foundation of China (U20A20293)
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