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Abstract
Atomic and close-to-atomic scale manufacturing (ACSM) has emerged as promising technologies in the manufacturing paradigm. Among various materials, 2D materials have garnered significant attention for ACSM due to their atomic-scale characteristics and physical properties. While chemical vapor deposition (CVD) can be employed to produce high-quality 2D materials, achieving patterning often relies on photolithography techniques, which limit scalability and introduce impurities. To address these challenges, this article serves as a review by focusing on exploring atomic-scale additive manufacturing methods for 2D materials. Several potential techniques are reviewed, including site-selective CVD, area-selective atomic layer deposition, electrodeposition, laser-assisted synthesis, print methods, and atomic layer-aligned stacking. The applications of atomic-scale additive manufacturing in various fields, such as electronics, biosensing, and nanoelectromechanical systems, are discussed. Finally, the future prospects of atomic-scale additive manufacturing for 2D materials based on existing research are delved into.
Funding Information
  • Science Foundation Ireland (20/FIP/PL/8741, 15/RP/B3208)
  • Enterprise Ireland (CF-2021-1635-P)

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