Characterization of WCx/B4C multilayers sputtered in reactive argon/methane atmospheres
Authors:
- P.E. DiehlPDP.E. Diehl
- Mark W. LundMLMark W. Lund
- D.W. MadsenDMD.W. Madsen
- L.C. McIntyreLML.C. McIntyre
- David J. SmithDSDavid J. Smith
- 1 February 1994
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 239 (1) , 57-70
Abstract
No abstract availableThis publication has 29 references indexed in Scilit:
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