Hysteresis compensation of piezoelectric deformable mirror based on Prandtl–Ishlinskii model
Authors:
- Jianqiang MaJMJianqiang Ma
- Lei TianLTLei Tian
- Yan LiYLYan Li
- Zongfeng YangZYZongfeng Yang
- Yuguo CuiYCYuguo Cui
- Jiaru ChuJCJiaru Chu
- 1 June 2018
- journal article
- research article
- Published by Elsevier in Optics Communications
- Vol. 416, 94-99
Abstract
No abstract availableKeywords
Funding Information
- National Natural Science Foundation of China (51675288, 51505238)
- Technological Research for Public Welfare Projects of Zhejiang Province (LGF18E050001)
- Natural Science Foundation of Ningbo Municipality (2017A610078)
- Ningbo University
This publication has 17 references indexed in Scilit:
- Unimorph deformable mirror for space telescopes: environmental testingOptics Express, 2016
- Eliminating hysteresis of piezoelectric deformable mirror by charge controlOptics Communications, 2015
- Scalable stacked array piezoelectric deformable mirror for astronomy and laser processing applicationsReview of Scientific Instruments, 2014
- Single-Crystal PMN-PT MEMS Deformable MirrorsJournal of Microelectromechanical Systems, 2011
- Bouc–Wen Modeling and Inverse Multiplicative Structure to Compensate Hysteresis Nonlinearity in Piezoelectric ActuatorsIEEE Transactions on Automation Science and Engineering, 2010
- A review, supported by experimental results, of voltage, charge and capacitor insertion method for driving piezoelectric actuatorsPrecision Engineering, 2010
- Switched capacitor charge pump reduces hysteresis of piezoelectric actuators over a large frequency rangeReview of Scientific Instruments, 2010
- Complete Open Loop Control of Hysteretic, Creeped, and Oscillating Piezoelectric CantileversIEEE Transactions on Automation Science and Engineering, 2009
- Extracting hysteresis from nonlinear measurement of wavefront-sensorless adaptive optics system.Optics Letters, 2008
- Hysteresis correction in the curvature adaptive optics systemJournal of the Optical Society of America A, 2005