Scanning optical microellipsometer for pure surface profiling
Authors:
- Chung Wah SeeCSChung Wah See
- Michael G. SomekhMSMichael G. Somekh
- Richard D. HolmesRHRichard D. Holmes
- 1 December 1996
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 35 (34) , 6663-6668
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
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