A novel fabrication process of 3D microstructures by double exposure in deep x-ray lithography (D2XRL)
Authors:
- Naoki MatsuzukaNMNaoki Matsuzuka
- Yoshikazu HiraiYHYoshikazu Hirai
- Osamu TabataOsamu Tabata
- 20 September 2005
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 15 (11) , 2056-2062
Abstract
No abstract availableKeywords
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