Oxidative decomposition of polymethylmethacrylate (PMMA) in plasma etching
Authors:
- M ZeunerMZM Zeuner
- J MeichsnerJMJ Meichsner
- H -U PollHPH -U Poll
- 1 August 1995
- journal article
- Published by IOP Publishing in Plasma Sources Science and Technology
- Vol. 4 (3) , 406-415
Abstract
No abstract availableKeywords
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