Absolute angular position measurement by dual-comb spectroscopy of an autocollimation diffracted beam
- 16 February 2023
- journal article
- research article
- Published by Optica Publishing Group in Optics Letters
- Vol. 48 (5) , 1104-1107
Abstract
The dual-comb technique is a powerful tool in industrial inspection and scientific research and is capable of realizing ultrahigh-resolution and fast broadband spectral measurements. We propose an absolute angular-position measurement method based on dual-comb spectroscopy. With a simple layout, the absolute angular position can be naturally determined through the traceable and wide-amplitude spectra of the autocollimation diffracted beams of the target grating. We experimentally demonstrate that a precision of 0.12 arcsec in the dynamic range of approximately 6660 arcsec, along with a 1 kHz repetition rate difference, is achieved. Compared with a commercial autocollimator, over 1000 arcsec, the comparison residuals are kept within ±0.3 arcsec.Keywords
Funding Information
- National Natural Science Foundation of China (52105555, 51835007)
- Foshan-Tsinghua Innovation Special Fund (2019THFS01)
This publication has 22 references indexed in Scilit:
- Distance Measurements Using Mode-Locked Lasers: A ReviewNanomanufacturing and Metrology, 2018
- Improving the accuracy of a dual-comb interferometer by suppressing the relative linewidthMeasurement Science and Technology, 2018
- Simultaneous multi-segmented mirror orientation test system using a digital aperture based on sheared Fourier analysisOptics Express, 2017
- Optical frequency domain angle measurement in a femtosecond laser autocollimatorOptics Express, 2017
- Mode-locked laser autocollimator with an expanded measurement rangeOptics Express, 2016
- Dual-comb spectroscopyOptica, 2016
- Parallel determination of absolute distances to multiple targets by time-of-flight measurement using femtosecond light pulsesOptics Express, 2015
- Measurement technologies for precision positioningCIRP Annals, 2015
- Absolute measurement of a long, arbitrary distance to less than an optical fringeOptics Letters, 2004
- Metrology, attitude, and orbit determination for spaceborne interferometric synthetic aperture radar1998