Nanoindentation and FEM study of the effect of internal stress on micro/nano mechanical property of thin CNx films
Authors:
- 1 December 2000
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 377-378, 138-147
Abstract
No abstract availableKeywords
This publication has 33 references indexed in Scilit:
- Nanoindentation and FEM study of the effect of internal stress on micro/nano mechanical property of thin CNx filmsThin Solid Films, 2000
- Compensating for elastic deformation of the indenter in hardness tests of very hard materialsJournal of Materials Research, 1999
- Nanoindentation of a 10 nm thick thin filmJournal of Materials Research, 1999
- Deconvolution of hardness from data obtained from nanoindentation of rough surfacesJournal of Materials Research, 1999
- Effect of irradiation ion species on internal stress in boron thin filmsJournal of Nuclear Materials, 1997
- Critical Review: Adhesion in surface micromechanical structuresJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 1997
- Nanoindentation and nanowear tests on amorphous carbon filmsPhilosophical Magazine A, 1996
- Raman and photoluminescence analysis of stress state and impurity distribution in diamond thin filmsJournal of Applied Physics, 1995
- An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experimentsJournal of Materials Research, 1992
- Photoluminescence studies of sintered diamond compactsJournal of Materials Science, 1984