Low-temperature deposited ZnO thin films on the flexible substrate by cathodic vacuum arc technology
Authors:
- Min-Hang WengMWMin-Hang Weng
- 1 June 2011
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 257 (16) , 7119-7122
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Education (98E-06-087)
- National Science Council (NSC 98-2221-E-020-017)
This publication has 18 references indexed in Scilit:
- Structural and optical characterization of Al-doped ZnO films prepared by thermal oxidation of evaporated Zn/Al multilayered filmsMaterials Chemistry and Physics, 2010
- Low temperature annealing effects on the structure and optical properties of ZnO films grown by pulsed laser depositionVacuum, 2010
- Structural, optical and electrical properties of Al-doped ZnO microrods prepared by spray pyrolysisThin Solid Films, 2010
- Highly Transparent InGaZnO[sub 4] Thin Film Transistors Using Indium-Doped ZnO Electrodes on Plastic SubstrateElectrochemical and Solid-State Letters, 2009
- Heat generation properties of Ga doped ZnO thin films prepared by rf-magnetron sputtering for transparent heatersThin Solid Films, 2008
- Fabrication of highly (1000) oriented textured zinc oxide films by metal cathodic arc and oxygen dual plasma deposition and their optical propertiesSurface and Coatings Technology, 2007
- Growth of zinc oxide films and nanowires by atmospheric-pressure chemical vapor deposition using zinc powder and water as source materialsSurface and Coatings Technology, 2007
- Improved properties of Al-doped ZnO film by electron beam evaporation techniqueMicroelectronics Journal, 2007
- Growth and characterization of ZnO thin films prepared by electrodeposition techniqueSolar Energy Materials and Solar Cells, 2006
- Low-temperature deposition of ZnO thin films on PET and glass substrates by DC-sputtering techniqueThin Solid Films, 2006