Highly sensitive CMUT-based humidity sensors built with nitride-to-oxide wafer bonding technology
Authors:
- Zhou ZhengZhou Zheng
- Yao YaoYao Yao
- Jiayu Alexander LiuJLJiayu Alexander Liu
- Yonghai SunYSYonghai Sun
- John T.W. YeowJYJohn T.W. Yeow
- 1 September 2019
- journal article
- research article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 294, 123-131
Abstract
No abstract availableKeywords
Funding Information
- Natural Sciences and Engineering Research Council of Canada
- Canada Research Chairs Program
- CMC Microsystems
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