Realization of counter-doped silicon modulators for efficient silicon optical interposers
Authors:
- 1 August 2017
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 157-158
Abstract
We fabricated counter-doped ring resonator modulators that guarantee the absence of unexpected p-i-n junctions in the ring waveguide due to overlay misalignments inherent to successive lithographic steps. Fabricated ring resonator modulators showed good efficiency (V π L at 1.55 V.cm at -1V) and transmission at 10 Gb.s -1 .Keywords
This publication has 2 references indexed in Scilit:
- Ring Resonator Modulators in Silicon for Interchip Photonic LinksIEEE Journal of Selected Topics in Quantum Electronics, 2013
- Progress in Low-Power Switched Optical InterconnectsIEEE Journal of Selected Topics in Quantum Electronics, 2010