Nanopotentiometry: Local potential measurements in complementary metal–oxide–semiconductor transistors using atomic force microscopy
Authors:
- 1 January 1998
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
- Vol. 16 (1) , 367-372
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Kelvin Probe Force Microscopy for Potential Distribution Measurement of Cleaved Surface of GaAs DevicesJapanese Journal of Applied Physics, 1997
- Chemical vapor deposition diamond for tips in nanoprobe experimentsJournal of Vacuum Science & Technology A, 1996
- Preparation of cross-section specimens for AFM imaging of metal/semiconductor interfacesJournal of Materials Science Letters, 1996
- Quantitative two-dimensional dopant profile measurement and inverse modeling by scanning capacitance microscopyApplied Physics Letters, 1995
- Kelvin probe force microscopyApplied Physics Letters, 1991