Ferroelectricity of Hf0.5Zr0.5O2 thin films grown by atomic layer deposition on epitaxial TiN bottom electrodes

Authors:
  • YHYoogeun Han
    Yoogeun Han
  • JJJuyoung Jeong
    Juyoung Jeong
  • JJJaeyoung Joo
    Jaeyoung Joo
  • YKYeong Gwang Khim
    Yeong Gwang Khim
  • MGMinseon Gu
    Minseon Gu
  • MHMoonsup Han
    Moonsup Han
  • YCYoung Jun Chang
    Young Jun Chang
  • HSHyunchul Sohn
    Hyunchul Sohn

Abstract
No abstract available
Funding Information
  • SK Hynix
  • Ministry of Land, Infrastructure and Transport
  • National Research Foundation of Korea (NRF-2020R1A2C200373211, RS-2024-00334854, RS-2023-00220471)

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