Ferroelectricity of Hf0.5Zr0.5O2 thin films grown by atomic layer deposition on epitaxial TiN bottom electrodes
Authors:
- Yoogeun HanYHYoogeun Han
- Juyoung JeongJJJuyoung Jeong
- Jaeyoung JooJJJaeyoung Joo
- Yeong Gwang KhimYKYeong Gwang Khim
- Minseon GuMGMinseon Gu
- Moonsup HanMHMoonsup Han
- Young Jun ChangYCYoung Jun Chang
- Hyunchul SohnHSHyunchul Sohn
- 30 September 2024
- journal article
- research article
- Published by Elsevier in Journal of Alloys and Compounds
- Vol. 1008
Abstract
No abstract availableKeywords
Funding Information
- SK Hynix
- Ministry of Land, Infrastructure and Transport
- National Research Foundation of Korea (NRF-2020R1A2C200373211, RS-2024-00334854, RS-2023-00220471)
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