Proposal for Micromachined Accelerometer, Based on a Contactless Suspension With Zero Spring Constant
- 28 February 2012
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Sensors Journal
- Vol. 12 (7) , 2407-2413
Abstract
In this paper, a micromachined accelerometer, based on a contactless suspension with a zero spring constant is proposed. The sensor provides the possibility of a significant increase in resolution. Minimization of the spring constant of the contactless suspension is achieved by combining inductive and electrical contactless suspensions. To study the conditions required to eliminate the spring constant of the suspension and achieve stable levitation of the accelerometer proof mass, a mathematical model of the suspension is developed. It is shown that such a suspension can be developed in principle.Keywords
This publication has 10 references indexed in Scilit:
- Proposal for a Micromachined Dynamically Tuned Gyroscope, Based on a Contactless SuspensionIEEE Sensors Journal, 2011
- Performance of an active electric bearing for rotary micromotorsJournal of Micromechanics and Microengineering, 2011
- Inductance2009
- The development of micro-gyroscope technologyJournal of Micromechanics and Microengineering, 2009
- Electrostatically levitated spherical 3-axis accelerometer2003
- Modelling of an accelerometer based on a levitated proof massJournal of Micromechanics and Microengineering, 2002
- Micromachined inertial sensorsProceedings of the IEEE, 1998
- Closed-loop silicon accelerometersIEE Proceedings - Circuits, Devices and Systems, 1998
- Modelling and testing of a frictionless levitated micromotorSensors and Actuators A: Physical, 1997
- Mechanical-thermal noise in micromachined acoustic and vibration sensorsIEEE Transactions on Electron Devices, 1993