Preparation of microporous membranes by TEOS/O3 CVD in the opposing reactants geometry
Authors:
- Shin-Ichi NakaoSNShin-Ichi Nakao
- Takeo SuzukiTSTakeo Suzuki
- Takashi SugawaraTSTakashi Sugawara
- Toshinori TsuruTTToshinori Tsuru
- Shoji KimuraSKShoji Kimura
- 1 May 2000
- journal article
- Published by Elsevier in Microporous and Mesoporous Materials
- Vol. 37 (1-2) , 145-152
Abstract
No abstract availableKeywords
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- Deposition of H2-permselective SiO2 filmsChemical Engineering Science, 1989