Effect of the electron thermal motion on the ponderomotive force in inductive plasma

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Abstract
Ponderomotive force in the inductively coupled discharge is analyzed in the kinetic approximation taking into account the effects of the electron thermal motion. It is shown that the ponderomotive force is significantly reduced in strongly nonlocal regimes when the characteristic transient frequency vth/δ far exceeds the frequency of the electromagnetic field oscillation ω,vth/δ>ω, where vth is the electron thermal velocity; δ is the characteristic length scale for field inhomogeneity. The developed theoretical model is in reasonable agreement with experimental data.

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