N-type implantation doping of GaN
Authors:
- Yoshitaka NakanoYNYoshitaka Nakano
- Tetsu KachiTetsu Kachi
- Takashi JimboTJTakashi Jimbo
- 1 October 2003
- journal article
- Published by Elsevier in Materials Science in Semiconductor Processing
- Vol. 6 (5-6) , 515-517
Abstract
No abstract availableKeywords
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