Surface oxidation of silicon carbide platelets as studied by x‐ray photoelectron spectroscopy and bremsstrahlung‐excited Auger electron spectroscopy
Authors:
- 1 February 1992
- journal article
- research article
- Published by Wiley in Surface and Interface Analysis
- Vol. 18 (2) , 159-162
Abstract
X‐ray photoelectron spectroscopy (XPS) and Bremsstrahlung‐excited Auger electron spectroscopy (XAES) were used to study the surface composition and oxidation of silicon carbide platelets which had been heated in air at 500–800° C. The surface oxide thickness for each heating time and temperature was calculated independently from the SiO 2 /SiC intensity ratios in both the Si 2p XPS and the Si KLL XAES spectra. The results from these two methods agreed to within our calculated experimental error. Both methods revealed that the oxidation rate was non‐linear and non‐parabolic in this temperature range. Boron oxide was observed on the SiC platelets after heat treatment. Boron is used by the manufacturer as a catalyst and remains as an impurity in the SiC platelets.Keywords
This publication has 33 references indexed in Scilit:
- Coating of Fibers by Colloidal Techniques in Ceramic Composites1990
- Stabilization of Silicon Carbide Whisker Suspensions: I, Influence of Surface Oxidation in Aqueous SuspensionsAdvanced Ceramic Materials, 1988
- Scanning tunneling microscopy of cubic silicon carbide surfacesJournal of Vacuum Science & Technology A, 1988
- Whisker-Reinforced Ceramic Matrix CompositesMRS Bulletin, 1987
- Kinetics and initial stages of oxidation of aluminum nitride: Thermogravimetric analysis and x-ray photoelectron spectroscopy studyJournal of Vacuum Science & Technology A, 1987
- Quantitative Wear Surface Analysis of SiC Using a Multiple-Technique ApproachAdvanced Ceramic Materials, 1986
- Characterization of β-SiC surfaces and the Au/SiC interfaceJournal of Vacuum Science & Technology A, 1986
- Energy and material dependence of the inelastic mean free path of low-energy electrons in solidsJournal of Vacuum Science & Technology A, 1985
- High-tech ceramics1984
- A Study of the Oxidation of Pure Silicon-carbide PowdersJournal of the Ceramic Association, Japan, 1957