Yb[sub 2]O[sub 3] Thin Films as a Sensing Membrane for pH-ISFET Application
Authors:
- Tung-Ming PanTung-Ming Pan
- Chih-Hung ChengCCChih-Hung Cheng
- Cheng-Da LeeCLCheng-Da Lee
- 1 January 2009
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 156 (5) , J108-J111
Abstract
This paper describes the physical properties and sensing characteristics of sensing membranes grown on Si(100) substrates by reactive sputtering. The structural and morphological features of these films with annealing at various temperatures were studied by X-ray diffraction, X-ray photoelectron spectroscopy, and atomic force microscopy. We found that films annealed at exhibit a high sensitivity of , a low hysteresis voltage of , and a small drift rate of . The good performance resulting from this annealing condition can be ascribed to the well-crystallized structure, the thin silica layer, and the large surface roughness.Keywords
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