Particle-plasma interactions during low pressure plasma deposition
Authors:
- D. ApelianDAD. Apelian
- D. WeiDWD. Wei
- M. PaliwalMPM. Paliwal
- 1 August 1984
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 118 (4) , 395-407
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
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- Experiments on heat transfer to wires in a partially ionized argon plasmaAIAA Journal, 1965