Secondary Electrons in EUV Lithography
Authors:
- Justin TorokJTJustin Torok
- Ryan Del ReRRRyan Del Re
- Henry HerbolHHHenry Herbol
- Sanjana DasSDSanjana Das
- Irina BocharovaIBIrina Bocharova
- Angela PaolucciAPAngela Paolucci
- Leonidas E. OcolaLOLeonidas E. Ocola
- Carl Ventrice Jr.CJCarl Ventrice Jr.
- Eric LifshinELEric Lifshin
- Greg DenbeauxGDGreg Denbeaux
- Robert L. BrainardRBRobert L. Brainard
- 1 January 2013
- journal article
- Published by Technical Association of Photopolymers, Japan in Journal of Photopolymer Science and Technology
- Vol. 26 (5) , 625-634
Abstract
No abstract availableThis publication has 35 references indexed in Scilit:
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