Quantitative analysis of the contrast modulation for multilateral shearing interferometers
- 23 August 2024
- journal article
- research article
- Published by Optica Publishing Group in Optics Express
- Vol. 32 (18) , 32421-32434
Abstract
Multilateral shearing interferometers (multi-LSIs) utilize the phase difference information of multiple shear directions with high accuracy and strong noise resistance. However, the interferogram fringe contrast of multi-LSIs can reverse due to the effect of contrast modulation, leading to incorrect measurement result. This issue has lacked comprehensive quantitative research to effectively guide the elimination of its effects. In this work, a quantitative analysis of the contrast modulation is proposed. This paper rigorously derives contrast modulation function, analyzing the effect of aberration and shear ratio on it. It is the first time that a quantitative theoretical model of aberration measurement range and shear ratio has been established, offering guidance in practical application for precise shear ratio adjustment to eliminate modulation effect and extend measurement range. By eliminating modulation effects, phase difference information from multiple directions can be effectively utilized, maximizing the benefits of multi-LSIs. In simulation and experiment, the distribution of fringe contrast reversal bands and the variation of aberration measurement range with shear ratio are consistent with theoretical analysis, which verifies the validity of the proposed approach. This approach aims to address the issue of interferogram fringe contrast inversion caused by modulation in multi-LSIs, providing a theoretical basis and practical guidance for precise measurement.Keywords
Funding Information
- National Science and Technology Major Project (2017ZX02101006-001)
- National Natural Science Foundation of China (61975013, 11627808)
This publication has 31 references indexed in Scilit:
- Wavefront Microscopy Using Quadriwave Lateral Shearing Interferometry: From Bioimaging to NanophotonicsACS Photonics, 2023
- Zernike polynomials and their applicationsJournal of Optics, 2022
- Relationship between shear ratio and reconstruction accuracy in lateral shearing interferometryOptical Engineering, 2020
- A phase unwrapping algorithm based on iterative zonal reconstruction technique2018
- Wavefront reconstruction for multi-lateral shearing interferometry using difference Zernike polynomials fittingOptics and Lasers in Engineering, 2018
- Systematic error analysis and correction in quadriwave lateral shearing interferometerOptics Communications, 2016
- Three-dimensional nanometre localization of nanoparticles to enhance super-resolution microscopyNature Communications, 2015
- EUV wavefront measurement of six-mirror optics using EWMS2008
- Accurate and highly resolving quadri-wave lateral shearing interferometer, from visible to IR2005
- Recent progress of EUV wavefront metrology in EUVA2004