Report on an international comparison of one-dimensional (1D) grating pitch
Authors:
- Jennifer E DeckerJDJennifer E Decker
- E BuhrEBE Buhr
- A DienerADA Diener
- B EvesBEB Eves
- A KuengAKA Kueng
- F MeliFMF Meli
- J R PekelskyJPJ R Pekelsky
- S-P PanSPS-P Pan
- B-C YaoBYB-C Yao
- 1 January 2009
- journal article
- Published by IOP Publishing in Metrologia
- Vol. 46 (1A) , 04001