Cost and cycle time performance of fabs based on integrated single-wafer processing
Author:
- S.C. WoodSWS.C. Wood
- 1 January 1997
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Semiconductor Manufacturing
- Vol. 10 (1) , 98-111
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- Control of MMST RTP: repeatability, uniformity, and integration for flexible manufacturing [ICs]IEEE Transactions on Semiconductor Manufacturing, 1994
- MMST manufacturing technology-hardware, sensors, and processesIEEE Transactions on Semiconductor Manufacturing, 1994
- Gigabit age microelectronics and their manufactureIEEE Transactions on Very Large Scale Integration (VLSI) Systems, 1993
- Performance Evaluation Of Adaptable Manufacturing Systems For Semiconductor IC Production1993
- Programmable Factory For Adaptable IC Manufacturing1993
- On the relationship between yield and cycle time in semiconductor wafer fabricationIEEE Transactions on Semiconductor Manufacturing, 1992
- Single-wafer high-pressure oxidation1992
- Single-wafer integrated semiconductor device processingIEEE Transactions on Electron Devices, 1992
- Simulation of a semiconductor manufacturing lineCommunications of the ACM, 1990