A PZT MEMS loudspeaker with a quasi-closed diaphragm
Authors:
- Yifei MaYMYifei Ma
- Yao LuYLYao Lu
- Ning DengNDNing Deng
- Qincheng ZhengQZQincheng Zheng
- Ke CaoKCKe Cao
- Haopu WangHWHaopu Wang
- Huikai XieHuikai Xie
- 25 May 2023
- journal article
- research article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 358
Abstract
No abstract availableKeywords
Funding Information
- Beijing Institute of Technology Research Fund Program for Young Scholars (XSQD-202206002)
- Beijing Institute of Technology
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