Improved broadband (75–110 GHz) radio frequency characteristics of MEMS shunt switches on quartz substrate

This publication has 21 references indexed in Scilit:

• A new analytical model for switching time of a perforated MEMS switch
  Microsystem Technologies, 2018
• A novel design of a low-voltage low-loss T-match RF-MEMS capacitive switch
  Microsystem Technologies, 2017
• A high-force and high isolation metal-contact RF MEMS switch
  Microsystem Technologies, 2017
• Design and simulation of a novel RF MEMS shunt capacitive switch with low actuation voltage and high isolation
  Microsystem Technologies, 2016
• Design of compact and wide bandwidth SPDT with anti-stiction torsional RF MEMS series capacitive switch
  Microsystem Technologies, 2014
• Effect of residual stress on RF MEMS switch
  Microsystem Technologies, 2011
• Distributed 2- and 3-Bit>tex<$W$>/tex<-Band MEMS Phase Shifters on Glass Substrates
  IEEE Transactions on Microwave Theory and Techniques, 2004
• MEM relay for reconfigurable RF circuits
  IEEE Microwave and Wireless Components Letters, 2001
• High-isolation CPW MEMS shunt switches. 1. Modeling
  IEEE Transactions on Microwave Theory and Techniques, 2000
• Performance of low-loss RF MEMS capacitive switches
  IEEE Microwave and Guided Wave Letters, 1998