Hybrid SIMS: Secondary Ion Mass Spectrometry Imaging with High Mass Resolving Power

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Abstract
Secondary ion mass spectrometry (SIMS) is the method of choice when high lateral resolution mass spectrometry imaging with only minimal sample preparation is needed. The aim to characterize complex samples, e.g. biological tissue, increases the demand for imaging instrumentation with high resolving power, i.e. the capability to separate ion signals with a small difference in mass. Higher mass resolving power significantly reduces the risk of misleading ion distribution images due to mass interferences. On the other hand, to obtain robust and confident (molecular) assignments of detected ion species MS/MS techniques paired with a high mass accuracy are essential. Ideally, the mass accuracy should not be affected by surface charging, sample topography, and primary ion beam parameters.