The effect of anisotropy on the deformation and fracture of sapphire wafers subjected to thermal shocks
Authors:
- L.C. ZhangLZL.C. Zhang
- 1 November 2007
- journal article
- Published by Elsevier in Journal of Materials Processing Technology
- Vol. 194 (1-3) , 52-62
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- The Effect of Thermal Shocks on the Stresses in a Sapphire WaferIEEE Transactions on Semiconductor Manufacturing, 2006
- Transient Thermal Analysis of Sapphire Wafers Subjected to Thermal ShocksIEEE Transactions on Semiconductor Manufacturing, 2006
- Reconciliation of ab initio theory and experimental elastic properties of Al2O3Applied Physics Letters, 2004
- r-axis sound speed and elastic properties of sapphire single crystalsJournal of Applied Physics, 2001
- Experimental and computational study of fracturing in an anisotropic brittle solidMechanics of Materials, 1998
- Thermodynamic Properties of Synthetic Sapphire (α-Al2O3), Standard Reference Material 720 and the Effect of Temperature-Scale Differences on Thermodynamic PropertiesJournal of Physical and Chemical Reference Data, 1993
- Enthalpy and Heat-Capacity Standard Reference Material: Synthetic Sapphire (Alpha-Al2O3) From 10 to 2250 KJournal of Research of the National Bureau of Standards, 1982
- Fracture Induced in Al 2 O 3 Bicrystals by Anisotropic Thermal ExpansionJournal of the American Ceramic Society, 1970
- Method for the determination of elastic constants of trigonal crystal systemsActa Crystallographica, 1961